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Article:   A Study on a Mechanical Vibration Assisted Plasma Etching. (1st Report). Prototyping of a Basic Reactor and Evaluation of the Vibration Effects.

Journal:   精密工学会誌   [0912-0289]

Author:   Masanori HAYASE
Year:  1999     Volume:  65     Issue:  9     Pages:  1335 - 1339

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