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Article:   Fast prototyping of high-aspect ratio, high-resolution X-ray masks by gas-assisted focused ion beam

Journal:   Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems   [0946-7076]

Author:   F. T. Hartley
Year:  2003     Volume:  9     Issue:  6-7     Pages:  409 - 412

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Springer Journals (NERL)
From 1997, volume 3: issue 1

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